(Peer-Reviewed) Ultra-high-Q photonic crystal nanobeam cavity for etchless lithium niobate on insulator (LNOI) platform
Zhi Jiang 蒋智 ¹, Cizhe Fang 方慈浙 ¹ ³, Xu Ran 冉旭 ¹, Yu Gao 高宇 ¹, Ruiqing Wang 王瑞清 ¹, Jianguo Wang 汪建国 ², Danyang Yao 姚丹阳 ¹, Xuetao Gan 甘雪涛 ², Yan Liu 刘艳 ¹ ³, Yue Hao 郝跃 ¹, Genquan Han 韩根全 ¹ ³
¹ State Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology, School of Microelectronics, Xidian University, Xi'an 710071, China
中国 西安 西安电子科技大学 宽带隙半导体技术国家重点学科实验室
² Key Laboratory of Light Field Manipulation and Information Acquisition, Ministry of Industry and Information Technology, and Shaanxi Key Laboratory of Optical Information Technology, School of Physical Science and Technology, Northwestern Polytechnical University, Xi'an 710129, China
中国 西安 西北工业大学物理科学与技术学院 陕西省光信息技术重点实验室 光场调控与信息感知工业和信息化部重点实验室
³ Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China
中国 杭州 西安电子科技大学杭州研究院
Opto-Electronic Advances, 2024-10-31
Abstract
The expansive spectral coverage and superior optical properties of lithium niobate (LN) offer a comprehensive suite of tools for exploring novel functionalities. Achieving high-quality (Q) photonic resonator cavities is crucial for enhancing light-matter interactions. However, this task is challenging as the device performance is heavily dependent on the fabrication quality of the LN.
In this paper, we present experimental validation of an etchless approach to fabricating high-Q photonic crystal nanobeam cavities (PCNBCs). We successfully fabricate PCNBCs with Q factors exceeding 105 while maintaining high transmittance by capitalizing on the low waveguide loss and high fabrication tolerance of TE-polarized mode. Remarkably, the Q factor achieved here exceeds previous reports on etchless LN PCNBCs by over an order of magnitude.
Benefiting from this advancement, we further explore a variety of optical functions, including thermo-optic tuning, optically induced bistability, and Fano line shapes generation. These findings present promising prospects for a versatile platform technique, facilitating the development of high-performance electro-optic or acousto-optic modulators, optical logic devices, and quantum photonics, highlighting its significant impact in the field of photonic integration.
Multi-photon neuron embedded bionic skin for high-precision complex texture and object reconstruction perception research
Hongyu Zhou, Chao Zhang, Hengchang Nong, Junjie Weng, Dongying Wang, Yang Yu, Jianfa Zhang, Chaofan Zhang, Jinran Yu, Zhaojian Zhang, Huan Chen, Zhenrong Zhang, Junbo Yang
Opto-Electronic Advances
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