(Peer-Reviewed) Laser direct writing of Ga₂O₃/liquid metal-based flexible humidity sensors
Songya Cui 崔颂雅 ¹ ², Yuyao Lu 陆雨姚 ¹, Depeng Kong 孔德朋 ¹, Huayu Luo 罗华昱 ¹, Liang Peng 彭亮 ², Geng Yang 杨赓 ¹, Huayong Yang 杨华勇 ¹, Kaichen Xu 徐凯臣 ¹
¹ State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University, Hangzhou 310030, China
中国 杭州 浙江大学机械工程学院 流体动力与机电系统国家重点实验室
² School of Information and Electrical Engineering, Hangzhou City University, Hangzhou 310015, China
中国 杭州 浙大城市学院 信息与电气工程学院
Opto-Electronic Advances, 2023-07-20
Abstract
Flexible and wearable humidity sensors play a vital role in daily point-of-care diagnosis and noncontact human-machine interactions. However, achieving a facile and high-speed fabrication approach to realizing flexible humidity sensors remains a challenge. In this work, a wearable capacitive-type Ga₂O₃/liquid metal-based humidity sensor is demonstrated by a one-step laser direct writing technique.
Owing to the photothermal effect of laser, the Ga₂O₃-wrapped liquid metal particles can be selectively sintered and converted from insulative to conductive traces with a resistivity of 0.19 Ω·cm, while the untreated regions serve as active sensing layers in response to moisture changes. Under 95% relative humidity, the humidity sensor displays a highly stable performance along with rapid response and recover time.
Utilizing these superior properties, the Ga₂O₃/liquid metal-based humidity sensor is able to monitor human respiration rate, as well as skin moisture of the palm under different physiological states for healthcare monitoring.
Polariton lasing in Mie-resonant perovskite nanocavity
Mikhail A. Masharin, Daria Khmelevskaia, Valeriy I. Kondratiev, Daria I. Markina, Anton D. Utyushev, Dmitriy M. Dolgintsev, Alexey D. Dmitriev, Vanik A. Shahnazaryan, Anatoly P. Pushkarev, Furkan Isik, Ivan V. Iorsh, Ivan A. Shelykh, Hilmi V. Demir, Anton K. Samusev, Sergey V. Makarov
Opto-Electronic Advances
2024-04-25
