(Peer-Reviewed) Femtosecond laser micro/nano-processing via multiple pulses incubation
Jingbo Yin 尹靖博 ¹ ², Zhenyuan Lin 林真源 ³, Lingfei Ji 季凌飞 ³, Minghui Hong 洪明辉 ¹ ² ⁴
¹ Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
中国 厦门 厦门大学萨本栋微米纳米科学技术研究院
² Discipline of Intelligent Instrument and Equipment, Xiamen University, Xiamen 361005, China
中国 厦门 厦门大学智能仪器与装备专业
³ School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China
中国 北京 北京工业大学物理与光电工程学院
⁴ Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province (IKKEM), Xiamen 361005, China
中国 厦门 福建能源材料科学与技术创新实验室（嘉庚创新实验室）
Opto-Electronic Technology, 2025-09-18
Abstract
As a flexible and efficient non-contact processing strategy in ambient air, femtosecond laser precision engineering has become an advanced technology for micro/nano-structure fabrication. Femtosecond laser can output ultrashort laser pulses at a very high repetition rate, ensuring higher machining accuracy and improving the machining efficiency.
The femtosecond laser manufacturing is mostly processed under multiple pulses irradiation. At a high repetition rate, incubation effect based on the multiple pulses irradiation provides a new theoretical and technical support to realize precision manufacturing. Herein, a systematic review is conducted on the influence of laser repetition rate spanning from kHz to GHz.
The physical mechanisms of three incubation modes, namely defects accumulation (kHz), heat accumulation (MHz), and plasma interaction (GHz), are summarized. The latest progress including micro/nano-structuring, nanostructure synthesis, three-dimensional functional structures fabrication and cross-scale precision engineering is explored. Furthermore, the prospect and challenge of the high-repetition-rate femtosecond laser processing in research frontiers and industrial applications are discussed.
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