Year
Month
(Peer-Reviewed) Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces
Ruozhong Han 韩若中 ¹, Yuchan Zhang 张羽婵 ¹, Qilin Jiang 蒋其麟 ¹, Long Chen 陈龙 ², Kaiqiang Cao 曹凯强 ³, Shian Zhang 张诗按 ¹, Donghai Feng 冯东海 ¹, Zhenrong Sun 孙真荣 ¹, Tianqing Jia 贾天卿 ¹ ² ⁴
¹ State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
中国 上海 华东师范大学物理与电子科学学院 精密光谱科学与技术国家重点实验室
² Institute of Laser Manufacturing, Henan Academy of Sciences, Zhengzhou 450046, China
中国 郑州 河南省科学院激光制造研究所
³ Institute of Physics, Chinese Acadamy of Sciences, Beijing 100190, China
中国 北京 中国科学院物理研究所
⁴ Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
中国 太原 山西大学极端光学省部共建协同创新中心
Opto-Electronic Science, 2024-03-22
Abstract

Femtosecond laser-induced periodic surface structures (LIPSS) have been extensively studied over the past few decades. In particular, the period and groove width of high-spatial-frequency LIPSS (HSFL) is much smaller than the diffraction limit, making it a useful method for efficient nanomanufacturing. However, compared with the low-spatial-frequency LIPSS (LSFL), the structure size of the HSFL is smaller, and it is more easily submerged. Therefore, the formation mechanism of HSFL is complex and has always been a research hotspot in this field.

In this study, regular LSFL with a period of 760 nm was fabricated in advance on a silicon surface with two-beam interference using an 800 nm, 50 fs femtosecond laser. The ultrafast dynamics of HSFL formation on the silicon surface of prefabricated LSFL under single femtosecond laser pulse irradiation were observed and analyzed for the first time using collinear pump-probe imaging method. In general, the evolution of the surface structure undergoes five sequential stages: the LSFL begins to split, becomes uniform HSFL, degenerates into an irregular LSFL, undergoes secondary splitting into a weakly uniform HSFL, and evolves into an irregular LSFL or is submerged.

The results indicate that the local enhancement of the submerged nanocavity, or the nanoplasma, in the prefabricated LSFL ridge led to the splitting of the LSFL, and the thermodynamic effect drove the homogenization of the splitting LSFL, which evolved into HSFL.
Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces_1
Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces_2
Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces_3
Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces_4
  • Deblurring, artifact-free optical coherence tomography with deconvolution-random phase modulation
  • Xin Ge, Si Chen, Kan Lin, Guangming Ni, En Bo, Lulu Wang, Linbo Liu
  • Opto-Electronic Science
  • 2024-01-31
  • Dynamic interactive bitwise meta-holography with ultra-high computational and display frame rates
  • Yuncheng Liu, Ke Xu, Xuhao Fan, Xinger Wang, Xuan Yu, Wei Xiong, Hui Gao
  • Opto-Electronic Advances
  • 2024-01-25
  • Multi-dimensional multiplexing optical secret sharing framework with cascaded liquid crystal holograms
  • Keyao Li, Yiming Wang, Dapu Pi, Baoli Li, Haitao Luan, Xinyuan Fang, Peng Chen, Yanqing Lu, Min Gu
  • Opto-Electronic Advances
  • 2024-01-25
  • Physics-informed deep learning for fringe pattern analysis
  • Wei Yin, Yuxuan Che, Xinsheng Li, Mingyu Li, Yan Hu, Shijie Feng, Edmund Y. Lam, Qian Chen, Chao Zuo
  • Opto-Electronic Advances
  • 2024-01-25
  • Advancing computer-generated holographic display thanks to diffraction model-driven deep nets
  • Vittorio Bianco, Pietro Ferraro
  • Opto-Electronic Advances
  • 2024-01-16
  • Inverse design for material anisotropy and its application for a compact X-cut TFLN on-chip wavelength demultiplexer
  • Jiangbo Lyu, Tao Zhu, Yan Zhou, Zhenmin Chen, Yazhi Pi, Zhengtong Liu, Xiaochuan Xu, Ke Xu, Xu Ma, Lei Wang, Zizheng Cao, Shaohua Yu
  • Opto-Electronic Science
  • 2024-01-09
  • Improved spatiotemporal resolution of anti-scattering super-resolution label-free microscopy via synthetic wave 3D metalens imaging
  • Yuting Xiao, Lianwei Chen, Mingbo Pu, Mingfeng Xu, Qi Zhang, Yinghui Guo, Tianqu Chen, Xiangang Luo
  • Opto-Electronic Science
  • 2024-01-05
  • Wide-spectrum optical synthetic aperture imaging via spatial intensity interferometry
  • Chunyan Chu, Zhentao Liu, Mingliang Chen, Xuehui Shao, Guohai Situ, Yuejin Zhao, Shensheng Han
  • Opto-Electronic Advances
  • 2023-3-10
  • Flat soliton microcomb source
  • Xinyu Wang, Xuke Qiu, Mulong Liu, Feng Liu, Mengmeng Li, Linpei Xue, Bohan Chen, Mingran Zhang, Peng Xie
  • Opto-Electronic Science
  • 2023-12-29
  • Smart palm-size optofluidic hematology analyzer for automated imaging-based leukocyte concentration detection
  • Deer Su, Xiangyu Li, Weida Gao, Qiuhua Wei, Haoyu Li, Changliang Guo, Weisong Zhao
  • Opto-Electronic Science
  • 2023-12-28
  • Exceptional-point-enhanced sensing in an all-fiber bending sensor
  • Zheng Li, Jingxu Chen, Lingzhi Li, Jiejun Zhang, Jianping Yao
  • Opto-Electronic Advances
  • 2023-12-12



  • Optical scanning endoscope via a single multimode optical fiber
    About
    |
    Contact
    |
    Copyright © PubCard