¹ State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai 200062, China
中国 上海 华东师范大学物理与电子科学学院 精密光谱科学与技术国家重点实验室
² Huawei Technologies Co, Ltd., Bantian Longgang District, Shenzhen 518129, China
中国 深圳 华为技术有限公司
³ Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
中国 太原 山西大学 山西省极端光学协同创新中心
This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film.
By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.