(Peer-Reviewed) Applications of lasers: A promising route toward low-cost fabrication of high-efficiency full-color micro-LED displays
Shouqiang Lai 赖寿强 ¹, Shibiao Liu 刘时彪 ¹, Zilu Li 李子路 ¹, Zhening Zhang 张哲宁 ¹, Zhong Chen 陈忠 ¹ ², Rong Zhang 张荣 ¹ ², Hao-Chung Kuo 郭浩中 ³ ⁴, Tingzhu Wu 吴挺竹 ¹ ²
¹ National Integrated Circuit Industry and Education Integration Innovation Platform, Department of Electronic Science, Xiamen University, Xiamen 361005, China
中国 厦门 厦门大学电子科学系 国家集成电路产教融合创新平台
² Innovation Laboratory for Sciences and Technologies of Energy Materials of Fujian Province (IKKEM), Xiamen 361005, China
中国 厦门 嘉庚创新实验室（福建能源材料科学与技术创新实验室）
³ College of Electrical and Computer Engineering, Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan, China
中国 台湾 新竹 阳明交通大学电机学院
⁴ Semiconductor Research Center, Hon Hai Research Institute, Taipei 11492, Taiwan, China
中国 台北 鸿海研究院半导体研究所
Opto-Electronic Science, 2023-12-06
Abstract
Micro-light-emitting diodes (micro-LEDs) with outstanding performance are promising candidates for next-generation displays. To achieve the application of high-resolution displays such as meta-displays, virtual reality, and wearable electronics, the size of LEDs must be reduced to the micro-scale. Thus, traditional technology cannot meet the demand during the processing of micro-LEDs.
Recently, lasers with short-duration pulses have attracted attention because of their unique advantages during micro-LED processing such as noncontact processing, adjustable energy and speed of the laser beam, no cutting force acting on the devices, high efficiency, and low cost.
Herein, we review the techniques and principles of laser-based technologies for micro-LED displays, including chip dicing, geometry shaping, annealing, laser-assisted bonding, laser lift-off, defect detection, laser repair, mass transfer, and optimization of quantum dot color conversion films.
Moreover, the future prospects and challenges of laser-based techniques for micro-LED displays are discussed.
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